Institute of Physics, University of Belgrade, Belgrade, Serbia

SYNTHESIS OF ULTRA-THIN OXIDE LAYER BY LASER-INDUCED SURFACE MODIFICATION OF MATERIALS

WG1 membersBranislav Jelenković, Dejan Pantelić, Branislav Salatić

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The main subjects of our research are pulsed laser modification of materials in air and different ambient conditions to achieve laser-induced surface oxidation and the formation specific nanostructures on the surface. The research includes synthesis of ultra-thin oxide layers and studies changes in composition, structure and morphologies after laser processing of materials. Optimal conditions for the formation of certain oxide layers are achieved by adjusting the parameters of laser radiation and controlled oxygen-rich atmosphere. Laser surface oxidation involves rapid melting, intermixing and solidification of the pre-deposited elements and co-deposited oxygen, to form a reaction zone confined to only the near-surface region within a very short interaction time.

Studies of the laser-induced surface oxidation on specific and complex targets, such as compact and multilayered thin films deposited on a substrate, are highly desirable, primarily due to the existence of new, improved properties of the reducible oxides.

Detailed characterization of the changes of the sample surface after laser irradiation was performed by various analytical techniques such as: XPS, AES, XRD, ERDA, RBS, PIXE, SEM and AFM.

XPS spectra of 2p Ti regions obtained on the surface before and after laser treatment with 10, 50 and 100 pulses.

XPS spectra of 2p Ti regions obtained on the surface before and after laser treatment with 10, 50 and 100 pulses.

AFM images of Ni/Ti thin film after laser irradiation with 100 laser pulses.

AFM image of Ni/Ti thin film after laser irradiation with 100 laser pulses.